一种直线压电电机驱动足的结构优化设计

直线压电电机在精密仪器、生物医学和半导体封装等行业具有广阔的应用前景，其定子结构特性直接影响了电机运行的稳定性和输出性能。以一种直线压电电机定子驱动足的位移输出特性为优化目标，研究该类电机驱动足结构优化设计方法，提高该类电机的综合输出性能。通过分析驱动足的微观几何位移特性，理论研究了驱动足结构参数对输出端宏观运动特性的影响。研究了不同结构下驱动足的输出特性，确定驱动足的结构参数及最优值。最后对优化后的驱动足位移输出性能和力学性能进行仿真分析。加工优化样机，并测试电机的机械输出性能。实验结果表明，电机的输出力为0.64 N，比优化前增大了52.4％。

Structure Optimization Design of a Linear Piezoelectric Motor Drive foot

The linear piezoelectric motor has a wide application prospect in precision instrument, biomedical and semiconductor packaging industries. Their stator structural characteristics directly affect the stability and output performance of the motor. Taking the displacement output characteristic of a stator driven foot of a linear piezoelectric motor as the optimization target, the optimal design method of the motor driven foot structure is studied to improve the comprehensive output performance of the motor. By analyzing the microscopic geometric displacement characteristics of the driving foot, the influence of the driving foot structure parameters on the macroscopic motion characteristics of the output is theoretically studied. The output characteristics of the driving foot under different structures are studied, and the structural parameters and optimal values of the driving foot are determined. In the end, the displacement output performance and mechanical properties of the optimized foot drive are simulated and analyzed. The optimized motor prototype is fabricated and the mechanical output performance of the motor is tested. The experimental results show that the output force of the motor is 0.64 N, which is 52.4% higher than that before optimization.