Hydrogen profiling in thin films using coincident ERD

By using the coincident measurement, an ERD method has been established and used for hydrogen profiling in thin foils. In the present study, 6 MeV has been used as incident particle, the scattered and the recoiled proton from one collision were coincidentally detected at 150 (proton) and 173.9 (). This method has been used for hydrogen profiling of 5.6 m Mylar and 8.6 m aluminium foils. Because of the coincident measurement, the background is largely reduced, and its minimum detection limit is about 0.5% (atomic), lower than the conventional ERD method. The measured depth resolution in 5.6 m Mylar is 0.6 m. It is possible to use this method for hydrogen profiling in thin foils of several micron thickness.