Synthesis of LaAlO3 by metal organic decomposition on SrTiO3 substrates |
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| Authors: | J.L. Ampuero I. Iliescu A. Jamaoui L. Rapenne C. Jimenez |
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| Affiliation: | Laboratoire des Matériaux et du Génie Physique (CNRS UMR 5628), Grenoble Institute of Technology, MINATEC, Grenoble Cedex 1, France |
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| Abstract: | LaAlO3 (LAO) films on SrTiO3 (STO) substrates have been produced by metal organic decomposition using La(C5H7O2)3 and Al(C5H7O2)3 as precursors dissolved in propionic acid. The process consists of growing thin layers through dip coating and subsequent annealing. After testing different cationic ratios of La and Al, it was determined that an optimal ratio leads to a single LAO phase film that grows epitaxially (cube on cube) on top of the STO. This was shown by X-ray diffraction (XRD) and transmission electron microscopy (TEM) analyses. These analyses, as well as additional X-ray reflectivity analysis, also revealed that the LAO's thickness obtained in one dip ranges from 8 nm to 16 nm. Taking advantage of the epitaxial conditions, several layers can be stacked by successive dip coatings and annealing to form an epitaxial structure. |
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| Keywords: | coated conductor metal organic decomposition LaAlO3 thin films XRD TEM |
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