Electro-mechanical coupling analysis of MEMS structures by boundary element method

In this paper, we present the applications of Boundary Element Method (BEM) to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems (MEMS). The algorithm is programmed in our research group based on BEM modeling for electrostatics and elastostatics. Good agreement is shown while the simulation results of the pull-in voltages are compared with the theoretical/experimental ones for some examples. The project supported by the 973 Program (G199033108) and the national Natural Science Foundation of China (10125211)