离轴非球面镜精磨阶段的三坐标检测技术

提出了使用三坐标测量机（CMM）对离轴非球面镜进行测量的方法。通过CMM对离轴非球面镜镜面进行自动测量，获得实际面形的三维坐标数据，并与理论离轴非球面镜模型进行分析比较，得到实际镜面的面形误差值和均方根值; 依据CMM的测量结果，完成了对离轴非球面镜精磨阶段的加工，解决了目前离轴非球面镜精磨阶段难于检测，以至于无法加工的问题。随着离轴非球面镜顺利进入抛光阶段，使用CMM实现了离轴非球面镜精磨检测与抛光检测的无缝对接。

Measuring technique for off-axis aspherical mirror in fine grinding process using coordinate measurement machine

A method was proposed to measure off-axis aspherical mirrors by a coordinate measurement machine (CMM). The 3D coordinates of the actual points on the off-axis mirrors were obtained with this method, and were compared with the data by the theoretical model, through which the profile errors and root-mean-square values of the actual mirrors were obtained. All the fine grinding processes were guided according to the measurement results. Thus the problem that off-axis mirrors are difficult to measure and manufacture is resolved. As the off-axis mirror came into the polishing process successfully, the measurement of off-axis aspherical mirrors in the grinding process was successfully followed by that in the polishing process.