| A12o3钝化及其在晶硅太阳电池中的应用 |
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| 引用本文： | 张祥,刘邦武,夏洋,李超波,刘杰,沈泽南.A12o3钝化及其在晶硅太阳电池中的应用[J].物理学报,2012,61(18):442-450. |
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| 作者姓名： | 张祥 刘邦武 夏洋 李超波 刘杰 沈泽南 |
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| 作者单位： | 中国科学院微电子器件与集成技术重点实验室,北京,100029 |
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| 基金项目： | 国家自然科学基金(批准号:61106060)资助的课题~~ |
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| 摘 要： | 介绍了A1203的材料性质及其原子层沉积制备方法，详细阐述了该材料的钝化机制（化学钝化和场效应钝化），并从薄膜厚度、热稳定性及叠层钝化等角度阐释其优化方案．概述了Al203钝化在晶体硅太阳电池中的应用，主要包括钝化发射极及背面局部扩散电池和钝化发射极及背表面电池．最后，对A1203钝化工艺的未来研究方向和大规模的工业应用进行了展望．
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| 关 键 词： | 氧化铝(A1203) 原子层沉积 晶硅太阳电池 钝化 |
The passivation of A12O3 and its applications in the crystalline silicon solar cell |
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| Zhang Xiang Liu Bang-Wu Xia Yang Li Chao-Bo Liu Jie Shen Ze-Nan.The passivation of A12O3 and its applications in the crystalline silicon solar cell[J].Acta Physica Sinica,2012,61(18):442-450. |
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| Authors: | Zhang Xiang Liu Bang-Wu Xia Yang Li Chao-Bo Liu Jie Shen Ze-Nan |
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| Institution: | Zhang Xiang Liu Bang-Wu Xia Yang+ Li Chao-Bo Liu Jie Shen Ze-Nan (Key Laboratory of Microelectronics Devices and Integrated Technology,Institute of Microelectronics, Chinese Academy of Sciences,Beijing 100029,China) |
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| Abstract: | The material characteristics and one of the preparation methods,atomic layer deposition of Al2O3 are introduced.The passivation mechanisms（chemical passivation and field-effect passivation） of Al2O3 films are demonstrated comprehensively,and optimization methods from the angles of film thickness,thermal stability and stack passivation are illuminated.The application of Al2O3 passivation in the crystalline silicon solar cell is provided,including passivated emitter rear locally diffused cell and passivated emitter and rear cell.Finally,the future study of the Al2O3 passivation process and the application to industry production are proposed. |
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| Keywords: | Al2O3 atomic layer deposition crystalline silicon solar cell passivation |
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