Quantitative nitrogen analysis by Auger electron spectrometry and glow discharge optical emission spectrometry |
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Authors: | Stefan Baunack Volker Hoffmann Wieland Zahn |
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Affiliation: | IFW Dresden, Leibniz-Institut für Festk?rper- und Werkstoffforschung Dresden, Postfach 270116, D-01171, Dresden, Germany Wests?chsische Hochschule Zwickau, Fachbereich Physikalische Technik/Informatik, Postfach 201037, D-08012, Zwickau, Germany
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Abstract: | Nitrides of refractory metals are investigated as diffusion barriers for Cu metallization. The composition, thermal stability and inter diffusion in layered systems are characterized by depth profile analysis. For the quantification of depth profiles determination of sensitivity factors is essential. For nitrogen and other light elements matrix specific standards are often not available and compound standards are used for calibration. We have investigated the systems Ta–N and Ta–Si–N and for comparison Cr–N by means of Auger electron spectrometry (AES) and glow discharge optical emission spectrometry (GDOES). A non-linear calibration curve for the N/Cr intensity ratio was observed with GDOES in the Cr–N-system, probably caused by self-absorption of the Cr line. |
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Keywords: | : AES GDOES nitride diffusion barrier depth profiling quantification. |
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