Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors |
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| Authors: | Yamauchi Kazuto Mimura Hidekazu Kimura Takashi Yumoto Hirokatsu Handa Soichiro Matsuyama Satoshi Arima Kenta Sano Yasuhisa Yamamura Kazuya Inagaki Koji Nakamori Hiroki Kim Jangwoo Tamasaku Kenji Nishino Yoshinori Yabashi Makina Ishikawa Tetsuya |
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| Institution: | Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-1871, Japan. yamauchi@prec.eng.osaka-u.ac.jp |
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| Abstract: | We have constructed an extremely precise optical system for hard-x-ray nanofocusing in a synchrotron radiation beamline. Precision multilayer mirrors were fabricated, tested, and employed as Kirkpatrick-Baez mirrors with a novel phase error compensator. In the phase compensator, an at-wavelength wavefront error sensing method based on x-ray interferometry and an in situ phase compensator mirror, which adaptively deforms with nanometer precision, were developed to satisfy the Rayleigh criterion to achieve diffraction-limited focusing in a single-nanometer range. The performance of the optics was tested at BL29XUL of SPring-8 and was confirmed to realize a spot size of approximately 7 nm. |
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