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Synthesis and thermal properties of aminopyrimidine Ge(II) precursors for CVD/ALD technology |
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| Authors: | Quan Wang Sannian Song Zhitang Song Dawei Wang Yuqiang Ding |
| Affiliation: | 1. The Key Laboratory of Food Colloids and Biotechnology, Ministry of Education, School of Chemical and Material Engineering, Jiangnan University, Wuxi, China 2. State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China |
| Abstract: | Derivatives of aminopyrimidine had been used as ligands in various metals complexes but not as precursors for PRAM. A series of aminopyrimidine Ge(II) precursors has been synthesized for the first time. The diamine germanium (II) precursors were tested by TG and demonstrated excellent volatilization. |
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