多腔耦合微波表面波PECVD法沉积 DLC薄膜研究

报道了利用多腔耦合微波表面波等离子体增强化学气相沉积(PECVD)的方法制备类金刚石(DLC)薄膜。通过发射光谱(OES)测量，对Ar等离子体中的各种放电参数以及全部四个腔室内放电的均匀性作出评估。采用表面轮廓仪测量了薄膜的厚度；薄膜的表面形貌、组成结构通过原子力显微镜(AFM)、激光拉曼光谱和X射线衍射光谱(XPS)进行了表征。在12.5μm厚度的有机薄膜聚酯(PET)表面沉积一定厚度DLC后，通过测量水蒸气透过率(WVTR)对DLC薄膜的阻隔性能进行了研究。结果表明，这种多腔耦合微波表面波等离子体装置，不仅能够实现四个腔室同时相对均匀的放电，也能够实现单个腔室的轴向均匀放电。制备的DLC薄膜结构致密、成分均匀，可以使PET薄膜阻隔性能提高约20倍。

Study on deposition of DLC coating by the multi-cavity coupling microwave surface-wave PECVD technique

The diamond-like carbon (DLC) coating is deposited by a multi-cavity coupling microwave surface-wave device based on plasma enhanced chemical vapor deposition (PECVD) technique. The optical emission spectrum (OES) is measured to assess the simultaneous discharge parameters in Ar plasma and the discharge uniformity in all four chambers. The surface profilometer is used to measure the coating thickness. The atomic force microscope (AFM), laser Raman spectrum and X-ray diffraction spectrum (XPS) are utilized to characterise the morphology and composition of coatings. The barrier property of DLC coating is detected by the water vapor transmission rate (WVTR) measurement after 12.5μm PET surface coated by DLC with certain thickness. The results show that the multi-cavity coupling microwave surface wave plasma device can achieve a relativity uniform discharge in all four cavities, as well as uniform discharge along the antenna in single cavity. The DLC coatings demonstrate a dense and uniform structure. The barrier property of PET is improved approximately 20 times.