Software support of the technology of substrates for multilayer interference structures |
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| Authors: | I S Savel’ev and S K Savel’ev |
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| Institution: | (1) School of Engineering and Applied Science, Harvard University, Oxford St 9, Cambridge, MA 02138, USA; |
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| Abstract: | A computer-aided machining (CAM) system for nanoscale polishing of cylindrical optical elements with a flat, parabolic, elliptic,
or table-defined generatrix we developed is described. This system is one of the key components of the fabrication of templates
for producing substrates of 2D optical systems based on multilayer interference structures. The field of application of this
software can be easily extended to production of various 3D surfaces. |
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