Contribution from the solid-phase interactions of activating oxides to their nonlinear joint effect on the thermal oxidation of GaAs |
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| Authors: | I Ya Mittova V F Kostryukov V R Pshestanchik I A Donkareva B L Agapov |
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| Institution: | (1) Voronezh State University, Universitetskaya pl. 1, Voronezh, 394893, Russia |
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| Abstract: | The contribution from the solid-phase interactions in the PbO + Sb2O3 and PbO + Bi2O3 activating compositions to the multichannel process of GaAs thermal oxidation has been determined by spatial separation of the oxides. The solid-phase interactions make a positive contribution to the overall negative nonlinear effect in the dependence of the oxide film thickness on the GaAs surface on the activator batch composition. The contributions from the oxide interactions on the semiconductor surface and in the gas phase have been evaluated for the PbO + Sb2O3 composition. |
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