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Fast sub-micrometer interference lithography on Silicon |
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| Authors: | H-B Jiang A Grossmann TW Hänsch |
| Institution: | Max-Planck-Institut für Quantenoptik, D-85740 Garching, Germany, DE Sektion Physik der Ludwig-Maximilians-Universit?t, Schellingstrasse 4, D-80799 München, Germany, DE |
| Abstract: | Received: 4 February 1998/Revised version: 18 February 1998 |
| Keywords: | PACS: 68 35 Bs 82 65 -i |
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