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Preparation of Thick PZT Ceramic Film by an Interfacial Polymerization
Authors:Masayuki Yamane
Affiliation:(1) Department of Inorganic Materials, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, Tokyo, 152, Japan
Abstract:The formation of a PZT film of 10–20 mgrm in thickness via an interfacial polymerization of metal-organic precursors has been studied. A commercially available PZT precursor solution developed for dip- or spin-coating was diluted with hexane containing acetylacetone as chelating agent. The solution was poured on water contained in a teflon reaction container of 88 mm inside diameter. A translucent gel film was formed at the interface of the two immiscible liquids. While floating on water it shrank as the evaporation of solvent proceeded until its diameter decreased to about 45% of its initial value. The dried gel film was almost pore free and its thickness was estimated to be about 10 mgrm.
Keywords:thick film  sol-gel  PZT  interfacial polymerization
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