KBA X射线显微镜装调方法研究

 KBA X射线显微镜为非共轴、掠入射软X射线成像系统，集光立体角很小，像质又要求非常高，这使得四个反射镜的安装位置要求相当严格。通常的位置或角度计量工具，在激光聚变靶室内空间受限的条件下，很难达到这么高的精度。因此为了保证KBA的成像质量，采用精度4″的测角仪使双反射镜的夹角误差小于20″。掠入射角对成像质量影响很大，为了使掠入射角小于10″，用自己设计的光路系统保证了掠入射角的精度要求。KBA X射线显微镜系统的主镜的孔径角4×10^－6 sr，无法实现锐聚焦。因此设计了一个辅助物镜代替它的主镜以实现锐聚焦。在某大型激光装置上进行的惯性约束聚变诊断实验中,运用这些方法所装调的KBA X射线显微镜获得了靶标(周期20 μm,线宽6 μm的无金膜镍网格)的清晰图像。

Installation and adjustment of KBA X-ray microscope

A KBA X-ray microscope is a non-coaxial grazing incident X-ray imaging system, whose solid angle is small and image quality requirement is high. It requires strict installation of four reflective mirrors. The conventional position or angle measurements, under the space confinement of the ICF target chamber, can not attain enough precision. In order to ensure the image quality, we use a 4″ precision goniometer to control the error of the angle between the bimirror less than 20″. The grazing incident angle has much effect on the imaging quality, therefore, in order to ensure a precision smaller than 10″, we have used our own optical path system. The principal mirror aperture angle of the KBA X-ray microscope is 4×10^－6 sr, which can not achieve sharp focusing, thus an auxiliar