Dust particles in collisionless plasma sheath with arbitrary electron energy distribution function |
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Authors: | J?Bla?ek P?Barto? R?Basner H?Kersten P??patenka |
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Institution: | (1) University of South Bohemia, Jeronymova 10, 371 15 České Budějovice, Czech Republic;(2) Institute for Nonthermal Physics, F.-L.-Jahn Strasse 19, 174 89 Greifswald, Germany |
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Abstract: | Dust particles often appear in industrial plasmas as undesirable product of the plasma-wall interactions. Large particles
of several micrometers in diameter are concentrated in a thin layer (the sheath) above the lower electrode of the rf driven
parallel plate device, where the electric force is strong enough to compensate particle’s gravity. Experimental and theoretical
uncertainties are significantly increased in the plasma sheath. Common models of dust charging in the plasma sheath suppose
the Maxwellian electron energy distribution function (EEDF) in conjunction with a flux of cold ions satisfying classical Bohm
criterion at the sheath edge. In this paper we generalize this model to arbitrary EEDF with adapted Bohm criterion. We limit
our considerations to collisionless or slightly collisional plasma, where the EEDF inside the sheath is expressed through
the EEDF in the plasma bulk. Derived theoretical formulas are incorporated into numerical model, describing collisionless
radio frequency (rf) plasma sheath together with the electrical charge, various kinds of forces, balancing radius and oscillation
frequency of particles. |
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Keywords: | PACS" target="_blank">PACS 52 40 Kh Plasma sheaths 52 27 Lw Dusty or complex plasmas plasma crystals |
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