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Identificationof micro-scale calorimetric devices |
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| Authors: | C. Auguet J. L. Seguin F. Martorell F. Moll V. Torra J. Lerchner |
| Affiliation: | 1. CIRG-DFA-ETSECCPB, Polytechnical University of Catalonia, Barcelona, Spain, 08034, Catalonia, Campus Nord B-4 2. Laboratoire Matériaux et Microélectronique de Provence (L2MP, UMR 6137 CNRS), Université d’Aix-Marseille III Faculté des Sciences et Techniques de St. Jér?me, Marseille, France, Cedex 20, case 152, 13397 3. DEE, Polytechnical University of Catalonia, Barcelona, Spain, 08034, Catalonia, C/Gran Capità s/n, Campus Nord C-3 4. Institut f. Physikalische Chemie, TU Bergakademie Freiberg, Freiberg/Sachsen, Germany, 09596, Leipziguer Str. 29 |
| Abstract: | Micro-calorimetric devices using Si-based sensors are very useful for the study of gas–solid reactions, in which very low mass of reactants are necessary. But in fact the consequence of using flat detectors is an increase of the uncertainty in the measured energy. In this work a calorimetric gas sensor based on Xensor chip is analysed studying the local x–y contributions of dissipation to the sensitivity related to the value in the centre. We study also the effects of the gas-flow on the sensitivity, comparing the results obtained with two Xensor type chips. Finally we carry out a deeper analysis of the x–y effects on the calorimetric detector for dissipations in the reactant shell extremely close to the detector surface to visualize the link between the power density distribution and the output signal. |
| Keywords: | accuracy chemical nose conduction calorimeters gas– solid detectors position effects |
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