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Comparative heat load testing of freestanding multilayer Mo/ZrSi2 and Mo/NbSi2 |
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| Authors: | M. N. Drozdov E. B. Kluenkov A. Ya. Lopatin V. I. Luchin A. E. Pestov N. N. Salashchenko N. N. Tsybin N. I. Chkhalo L. A. Shmaenok |
| Affiliation: | 1. Institute of Physics for Microstructures, Russian Academy of Sciences, Nizhni Novgorod, 603950, Russia 2. PhysTeX, Vaals, 6290 AB, Netherlands |
| Abstract: | The thermal stability of multilayer thin-film Mo/ZrSi2 and Mo/NbSi2 filters in the temperature range of 840–940°C upon long-term heating in vacuum is investigated. The filter transmittance is measured before and after current annealing and a layer-by-layer SIMS analysis of the structure is performed. Comparative testing shows that the Mo/NbSi2 structure is less thermostable at high thermal loads. |
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