| 基于MEMS的生物微喷点样技术研究现状与展望 |
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| 引用本文： | 乔治,金庆辉,许宝建,程建功,赵建龙,杨梦苏. 基于MEMS的生物微喷点样技术研究现状与展望[J]. 微纳电子技术, 2006, 43(10): 481-486 |
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| 作者姓名： | 乔治 金庆辉 许宝建 程建功 赵建龙 杨梦苏 |
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| 作者单位： | 1. 中国科学院,上海微系统与信息技术研究所,上海,200050;中国科学,院研究生院,北京,100039
2. 中国科学院,上海微系统与信息技术研究所,上海,200050 |
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| 基金项目： | 国家重点基础研究发展计划(973计划);中国科学院资助项目 |
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| 摘 要： | 基于MEMS的生物微喷点样技术研究是当今药物分配领域中的热点。与传统方法相比,微喷点样技术具有体积小、操作简便、速度快等优点。对近几年微喷点样技术的研究新进展进行了综述,按照驱动方式的不同对各种微喷点样技术进行了分类,并分别阐述了各自不同的制作方法,最后分析了MEMS微喷点样技术所面临的挑战和发展趋势。
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| 关 键 词： | 微喷 非接触式喷点技术 微阵列 |
| 文章编号： | 1671-4776(2006)10-0481-06 |
| 收稿时间： | 2006-03-30 |
| 修稿时间： | 2006-03-30 |
Development and Review of MEMS-Based Bio-Micro-Dispensers Technology |
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| QIAO Zhi,JIN Qing-hui,XU Bao-jian,CHENG Jian-gong,ZHAO Jian-long,YANG Meng-su. Development and Review of MEMS-Based Bio-Micro-Dispensers Technology[J]. Micronanoelectronic Technology, 2006, 43(10): 481-486 |
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| Authors: | QIAO Zhi JIN Qing-hui XU Bao-jian CHENG Jian-gong ZHAO Jian-long YANG Meng-su |
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| Affiliation: | 1.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; 2Graduate School of the Chinese Academy of Sciences, Beijing 100049, China |
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| Abstract: | Research on the MEMS-based micro-dispensers technology in biology is an important project in drug dispensing nowadays. Compared with conventional methods, micro-dispensers technology is superior in several aspects, such as smaller volume, simpler operation process and less operation time. Recent progress in research of micro-dispensers technologies were reviewed. According to the actuating methods, micro-dispensers technologies were classified into several sorts, and various fabrication processes were introduced. Challenges and trends of micro-dispensers technology were proposed. |
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| Keywords: | micro-dispensers inkjet printing micro-array |
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