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Nanostructuring in a system consisting of a thin metal film on a dielectric substrate under irradiation with a high-power ion beam of nanosecond duration
Authors:V. S. Kovivchak  T. V. Panova  R. B. Burlakov
Affiliation:(1) Omsk State University, Omsk, 644077, Russia;(2) Omsk Branch of the Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Omsk, 644027, Russia
Abstract:The formation of metal nanoparticles in a system containing a thin metal film on a dielectric substrate and irradiated with a high-power ion beam of nanosecond duration is studied. The nanoparticle formation mechanism is discussed.
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