Sputtering of Cu atoms by Ar ions |
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| Authors: | J Likonen M Hautala |
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| Institution: | (1) Reactor Laboratory, Technical Research Centre of Finland, Otakaari 3 A, SF-02150 Espoo, Finland;(2) Department of Physics, University of Helsinki, Siltavuorenpenger 20 D, SF-00170 Helsinki, Finland |
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| Abstract: | Sputtering of Cu single-crystal, polycrystal and amorphous targets by 5 keV Ar ions has been studied by the binary collision
lattice simulation code Cosipo. The sputtering yields, angular distributions, energy distributions and the space distributions
of the original positions of the sputtered Cu atoms have been calculated. The results are discussed within the framework of
cascade generations and surface structure. |
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