MEMS环形谐振器椭圆模态中的锚损分析（英）

环形谐振器是微机电系统（MEMS）谐振器中典型结构之一。其中，椭圆模态是环形谐振器面内振动的一阶模态，也是使用最为普遍的模态。以降低谐振器振荡时的锚损为目标，以有限元分析为技术手段，采用能量法对环形谐振器锚点的几何尺寸进行定量分析。分析结果表明，与研究者普遍认为的观点相反，谐振器锚点振荡模态的激发并不有助于提高谐振器的Q值。

Numerical analysis of anchor mode effect in elliptic mode MEMS ring resonator

The ring shaped resonator is a typical structure which is widely applied in MEMS resonator study. Elliptic mode is the basic in-plane vibration mode of ring resonator. This paper presents the numerical analysis of anchor effect in the elliptic mode ring resonator based on energy method. The results show that activating the anchor mode can help to reduce the anchor loss. However, the quality factor of resonator can not be thus increased as the researchers previously suggested. The energy method suggested in this study provides an instructive way of anchor geometry design for MEMS resonators.