PI参数优化实现CO2激光快速选线稳定输出

通过优化驱动光栅的电机PI控制器参数确定方法，加强了伺服电机的定位精度及稳定性，提升了单光路可调谐TEA CO2激光器的弱线输出稳定性并缩短了调谐间隔。该参数确定的方法基永磁同步电机（Permanent Magnet Synchronous Motor，PMSM）的频域模型，推导出了伺服三环比例积分控制器（Proportional Integral，PI）的解析表达式，并根据工程实际需求设定超调量与峰值时间，求出截止频率，以此确定满足最大相位裕度的条件下的伺服三环PI控制器的参数。采用PML40-530B8ANL交流直驱电机及G-POLHOR10P100EE-E0驱动器搭建了光路实验装置对上述参数进行了验证，转台定位系统的超调量为4.86%，调节间隔为19.5 ms。基于该转台系统搭建了快调谐TEA CO2激光器，在20 ms调谐间隔下进行激光器弱线能量稳定性实验，9P（44）谱线的单脉冲能量小于74 mJ，能量波动范围小于3.35%，能量稳定度提高了3.62倍。

PI parameter optimization for CO2 laser fast line selection stable output

By optimizing the PI controller parameter tuning method of the motor that drives the grating, the positioning accuracy and stability of the servo motor were enhanced, and the line selection output of the single-path tunable TEA CO2 laser was improved and the tuning interval was shortened. The frequency domain model of the method of Permanent Magnet Synchronous Motor (PMSM) was deduced by the parameter. The analytical expression of the servo three-loop Proportional Integral (PI) was derived and set according to the actual requirements of the project. The PML40-530B8ANL AC direct drive motor and G-POLHOR10P100EE-E0 drive were used to build the optical path experimental device to verify the above parameters. The overshoot of the turntable positioning system is 4.86%, and the adjustment interval is 19.5 ms. Based on the turntable system, a fast-tuning TEA CO2 laser was built, and the laser weak line energy stability experiment was carried out during a tuning interval of 20 ms. The single pulse energy of the 9P(44) line is 74 mJ, the energy fluctuation range is 3.35%, and the energy stability was increased by 3.62 times.