法布里-珀罗薄膜干涉的光纤温度传感器

为了研制结构简单、成本低、可批量生产的微型光纤温度传感器，分析了薄膜干涉型光纤温度传感器的原理，选用ZrO2和Al2O3两种介质薄膜材料，采用TFCalc膜系设计软件设计了薄膜干涉型光纤温度敏感探头的膜系，由南光ZZS1100-8/G箱式真空镀膜系统采用电子束蒸发技术在普通多模光纤端面蒸镀介质薄膜，形成法布里-珀罗（Fabry-Perot）薄膜干涉，并搭建光纤温度传感测试系统，测试结果表明:在200~600℃范围内，所设计的干涉型光纤温度传感器的测试光谱随温度变化产生一定的波长漂移，且波长漂移的温度特性为线性，线性相关系数为99.7%，灵敏度为8.3710-6/℃。基于法布里-珀罗干涉的薄膜型光纤温度传感器体积小，成本低，结构紧凑，可批量生产，适合安装位置狭小或对传感器集成化要求较高的场合。

Optical fiber temperature sensor based on Fabry-Perot coating interference

In order to develop a miniature fiber-optic temperature sensor with simple structure, low cost and mass production, the principle of optical coating interference-based temperature sensor was analyzed. The coating formula of temperature sensing probe was designed by TFCalc formula designing software using ZrO2 and Al2O3 materials. The thin film was deposited on the tip of multimode fiber by using electron-beam evaporation in Nanguang ZZS1100-8/G box type vacuum coating machine. The measurement system of coating interference-based temperature sensor was interrogated. The experimental result shows that the wavelength shift of the fiber-optic temperature sensor is linear in the range of 200-600℃, and the correlation coefficient was calculated to be 99.7%, the sensitivity of temperature is 8.3710-6/℃. The temperature sensor based on Fabry-Perot interference is suitable for mass production with stable performance, accurate point measurement, narrow installation position or higher application requirements for integrated sensor.