GISAXS: A versatile tool to assess structure and self-assembly kinetics in block copolymer thin films |
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| Authors: | Detlef-M Smilgies |
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| Institution: | Center for Advanced Microelectronics Manufacturing (CAMM), Binghamton University, Binghamton, New York, USA |
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| Abstract: | Over the past two decades grazing incidence small-angle scattering (GISAXS) has morphed into a powerful tool for the determination of the structure and self-assembly kinetics of block copolymer thin films. An overview of the scattering process and the interpretation of GISAXS data is given and experimental requirements are discussed. The application of the technique for the characterization of block copolymer thin films is illustrated with selected examples. |
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| Keywords: | block copolymers GISAXS kinetics self-assembly structure |
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