| 一种复合式MEMS皮拉尼真空计的设计 |
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| 引用本文： | 周琼,傅剑宇,刘超,侯影,陈大鹏.一种复合式MEMS皮拉尼真空计的设计[J].微纳电子技术,2021(1):47-53. |
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| 作者姓名： | 周琼 傅剑宇 刘超 侯影 陈大鹏 |
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| 作者单位： | 1.中国科学院微电子研究所集成电路先导工艺研发中心;2.中国科学院大学;3.无锡物联网创新中心有限公司 |
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| 基金项目： | 国家自然科学基金资助项目(61874137);北京市科委重点研发计划资助项目(Z191100010618005);中国科学院科研仪器设备研制项目(ZDKYYQ20200007)。 |
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| 摘 要： | 微电子机械系统(MEMS)皮拉尼真空计可广泛用于芯片封装和设备测试等领域.量程是MEMS皮拉尼真空计的重要性能指标之一.设计了一种复合式MEMS皮拉尼真空计,通过将具有不同测量范围的两款器件串联复合在同一芯片上,实现量程的扩展.以二极管型皮拉尼真空计为例设计了器件结构,优化了尺寸参数,并给出了兼容CMOS工艺的制造方案...
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| 关 键 词： | 微电子机械系统(MEMS) 皮拉尼真空计 串联复合 二极管型 COMSOL仿真 |
Design of Composite-Type MEMS Pirani Vacuum Gauge |
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| Zhou Qiong,Fu Jianyu,Liu Chao,Hou Ying,Chen Dapeng.Design of Composite-Type MEMS Pirani Vacuum Gauge[J].Micronanoelectronic Technology,2021(1):47-53. |
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| Authors: | Zhou Qiong Fu Jianyu Liu Chao Hou Ying Chen Dapeng |
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| Institution: | (Integrated Circuit Aduanced Process R&.D Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China;Wuxi IOT Innovation Center Co.,Ltd.,Wuzi 214135,China) |
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| Abstract: | Micro-electromechanical system(MEMS)Pirani vacuum gauges can be widely used in chip packaging,equipment testing and other fields.Measurement range is one of the important performance indicators of MEMS Pirani vacuum gauges.A composite-type MEMS Pirani vacuum gauge was designed,and its measurement range was expanded by combining two devices with different measuring ranges in series on the same chip.With a diode-type Pirani vacuum gauge as an example,the device structure was designed,the size parameters was optimized,and a manufacturing scheme compatible with CMOS process was given.Finally,through COMSOL simulation,the designed device has a pressure measurement range of 2.5×10-3~1.15×106Pa and a average sensitivity of 132 mV/dec.Compared with the existing single and combined-type devices,the designed composite-type MEMS Pirani vacuum gauge has larger range and higher sensitivity in a small size. |
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| Keywords: | micro-electromechanical system(MEMS) Pirani vacuum gauge compound in series diode-type COMSOL simulation |
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