Compositional stability in GeO x and SbO x thin films for optical-storage applications

Laser-induced transformations (optical and compositional) of amorphousMO _x thin films are studied as a function of the oxygen content and the nature of theM element,M being either a semiconductor (Ge) or a semi-metal (Sb). A high optical contrast in reflectivity is always found associated to the first laser pulses, this process being unaffected by the presence of oxygen. Next pulses lead to a process which may involve optical changes depending on the environmental conditions. Whereas the former optical changes are most likely related to a structural process which is completed before oxidation starts, the latter ones occur when irradiating at high oxygen pressures (1.2 bar) and thus they are easily related to an oxidation process. At low oxygen pressures (close to the oxygen partial pressure in air), the films show a good compositional stability upon irradiation together with a high optical contrast.