| 飞秒激光加工最新进展 |
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| 引用本文： | 孙晓慧,周常河,余昺鲲.飞秒激光加工最新进展[J].激光与光电子学进展,2004,41(9):37-45. |
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| 作者姓名： | 孙晓慧 周常河 余昺鲲 |
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| 作者单位： | 中科院上海光机所信息光学实验室,上海,201800;上海大学物理系,上海,200436;中科院上海光机所信息光学实验室,上海,201800;上海大学物理系,上海,200436 |
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| 摘 要： | 综述了飞秒激光进行材料加工的多种机理和理论；主要介绍了飞秒激光对玻璃、石英、金属、聚合物等各种材料加丁的最新研究进展状况及各方面的应用；飞秒激光加工是门新兴的学科，具有重要的应用前景。
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| 关 键 词： | 飞秒激光 微加工 烧蚀 非线性吸收 |
| 收稿时间： | 2004/4/23 |
The latest development of femtosecond laser processing |
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| SUN Xiaohui ZHOU Changhe YU Bingkun.The latest development of femtosecond laser processing[J].Laser & Optoelectronics Progress,2004,41(9):37-45. |
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| Authors: | SUN Xiaohui ZHOU Changhe YU Bingkun |
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| Institution: | SUN Xiaohui ZHOU Changhe YU BingkunShanghai Institute of Optics and Fine Mechanics,The Chinese Academy of Sciences,Shanghai 201800Department of Physics,Shanghai University,Shanghai 200436 |
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| Abstract: | Various mechanisms and theory of femtosecond laser are summarized; the latest development of fabrication with femtosecond laser including various glasses, quartz, metals and polymers are mtroduced; femtosecond laser processing is an emerging field and has important application prospects. |
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| Keywords: | femtosecond laser microfabrication ablation nonlinear absorption |
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