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Structural and photoluminescence properties of Si nanoclusters obtained by ion implantation into Si3N4 films |
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| Authors: | F.L. Bregolin U.S. Sias E.C. Moreira |
| Affiliation: | a Instituto de Física, Universidade Federal Rio Grande do Sul, CP 15051, 91501-970 Porto Alegre, RS, Brazil b Instituto Federal de Educação, Ciência e Tecnologia sul-rio-grandense-Campus Pelotas, 96015-370 Pelotas-RS, Brazil c Universidade Federal do Pampa—Campus Bagé, 96400-970 Bagé-RS, Brazil |
| Abstract: | In the present paper we report structural and photoluminescence (PL) results from samples obtained by Si implantation into stoichiometric silicon nitride (Si3N4) films. The Si excess was introduced in the matrix by 170 keV Si implantation performed at different temperatures with a fluence of Φ=1×1017 Si/cm2. The annealing temperature was varied between 350 and 900 °C in order to form the Si precipitates. PL measurements, with a 488 nm Ar laser as an excitation source, show two superimposed broad PL bands centered around 760 and 900 nm. The maximum PL yield is achieved for the samples annealed at 475 °C. Transmission electron microscopy (TEM) measurements show the formation of amorphous nanoclusters and their evolution with the annealing temperature. |
| Keywords: | Silicon nitride photoluminescence Silicon nitride nanoclusters Ion implantation Photoluminescence |
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