| 硅基光学相控阵性能评估方法 |
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| 引用本文： | 张耀元,王锐,姜瑞韬,杜坤阳,李远洋. 硅基光学相控阵性能评估方法[J]. 应用光学, 2021, 42(2): 242-246. DOI: 10.5768/JAO202142.0201006 |
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| 作者姓名： | 张耀元 王锐 姜瑞韬 杜坤阳 李远洋 |
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| 作者单位： | 1.中国科学院 长春光学精密机械与物理研究所 激光与物质相互作用重点实验室，吉林 长春 130033 |
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| 基金项目： | 吉林省重大科技攻关专项（20190302050GX） |
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| 摘 要： | 针对典型光学相控阵,建立了一套硅基光学相控阵芯片性能评估方法,为光学相控阵优化设计提供可靠的数据支撑.通过设计傅里叶成像系统对光学相控阵进行动态成像,能够实现对近场远场成像的同步观察.在该基础上设计校准方案对相控阵初始相位进行校准优化,同时对扫描速度、角度和精度等特性参数进行了从理论推导和仿真到测试系统结构设计的整体分...
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| 关 键 词： | 硅基光学相控阵 测试系统 性能评估 相位校准 |
| 收稿时间： | 2021-01-07 |
Performance evaluation method of silicon-based optical phased array |
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| Affiliation: | 1.Key Laboratory of Laser-Matter Interaction, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China2.University of Chinese Academy of Sciences, Beijing 100049, China |
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| Abstract: | Aiming at the typical optical phased array, a set of silicon-based optical phased array chip performance evaluation methods were established to provide reliable data support for the optimal design of optical phased arrays. By designing a Fourier imaging system, the optical phased array could be dynamically imaged, and simultaneous observation of near-field and far-field imaging could be achieved. On this basis, a calibration scheme was designed to optimize the initial phase of the phased array. At the same time, the characteristic parameters such as scanning speed, angle and accuracy were analyzed from theoretical derivation and simulation to the structural design of the test system. |
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