Lead zirconate titanate (PZT) films deposited by a hydrothermal method |
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| Authors: | S bastien Euphrasie, Sylvie Daviero-Minaud,Philippe Pernod |
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| Affiliation: | a IEMN, institut d'electronique, de microélectronique et de nanotechnologie, CNRS/UMR 8520, DOAE, École centrale de Lille, BP 69, 59652, Villeneuve d'Ascq cedex, France;b LCPS, laboratoire de cristallochimie et physicochimie du solide, CNRS/UMR 8012, École nationale supérieure de chimie de Lille, BP 108, 59652, Villeneuve d'Ascq cedex, France |
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| Abstract: | We present a hydrothermal method to deposit PZT films. It uses a single-step hydrothermal process and user-friendly precursors. Pb(Zr0.52,Ti0.48)O3 polycrystalline films, 5–10 μm thick, were produced in an aqueous basic solution (4M KOH) on a titanium substrate in a closed autoclave at 180 °C. A time-depending study to see the evolution of the films' formation is described. Some actuation testing is also presented. |
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| Keywords: | PZT film Hydrothermal Piezoelectricity |
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