强脉冲X射线辐照在Si-SiO2中感生的界面态及退火消除

 利用强脉冲X射线对Si-SiO₂界面进行了辐照，测量了界面态曲线和退火曲线。实验显示，经过强脉冲X射线对Si-SiO₂界面进行的辐照，在Si-SiO₂界面感生出新的界面态，感生界面态的增加与辐照剂量成正比，并且易出现饱和现象。总结出了感生界面态密度产额Dit随辐照剂量D变化的分布式，并定性分析了Dit随D变化的行为。随后进行的退火实验表明，强脉冲X射线辐照感生出的界面态越多，退火时这些界面态就消除得越快。退火过程显示有滞后现象，即辐照剂量大的阈电压漂移，在退火后恢复的绝对值，要小于辐照剂量小的阈电压漂移。导出了阈电压漂移随退火时间变化的关系，定性解释了滞后现象。

Radiation-induced interface states of Si-SiO2 by intense pulse X-ray and their annealing

Irradiated by intense pulse X-ray, density of Si-SiO 2 interface states and annealing process are measured. Experiment results show that radiation-induced interface traps in Si-SiO 2 increase with the dose. A distribution about density of Si-SiO 2 interface states vs. radiation dose is summarized and thus radiation impairment effects and mechanism are discussed. Experiment shaw that:(1) interface states induced by intense radiation saturated easily, (2) that the more radiation-induced interface states, the more rapid they eliminate in annealing process, (3) there exist retardation in annealing process, which means after annealing process, the threshold voltage shift caused by high dose radiation goes smaller than that caused by low dose radiation, (4) an annealing formula about threshold voltage shift vs. annealing time is deduced to the retardation.