| 大角度离子注入机控制系统软件设计 |
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| 引用本文： | 罗宏洋,孙勇,王玮琪.大角度离子注入机控制系统软件设计[J].电子工业专用设备,2009,38(2):19-23. |
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| 作者姓名： | 罗宏洋 孙勇 王玮琪 |
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| 作者单位： | 中国电子科技集团公司电子第四十八研究所,湖南,长沙,410111;中国电子科技集团公司电子第四十八研究所,湖南,长沙,410111;中国电子科技集团公司电子第四十八研究所,湖南,长沙,410111 |
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| 摘 要： | 大角度离子注入机的控制系统具有控制部件和控制算法复杂、支持SEMI自动化软件标准等特点，通过优化软件结构和关键控制算法，成功实现控制系统设计和GEM标准组件设计，测试证明软件自动化程度高、稳定、可靠。
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| 关 键 词： | 大角度离子注入机 软件结构 SEMI自动化软件标准 |
Design of the Large Tilt Ion Implanter Control System Software |
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| LUO Hongyang,SUN Yong,Wang Weiqi.Design of the Large Tilt Ion Implanter Control System Software[J].Equipment for Electronic Products Marufacturing,2009,38(2):19-23. |
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| Authors: | LUO Hongyang SUN Yong Wang Weiqi |
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| Institution: | LUO Hongyang,SUN Yong,Wang Weiqi (48th Institute of CETC,Changsha 410111,China) |
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| Abstract: | Control system of the large tile ion implanter is characterized by complicated control com- ponents and control algorithms, and also it must be supported by the SEMI Automation Software Stan- dards. The control system and the GEM components are successfully designed by optimized the struc- ture and the key control algorithms of the software, the final test has proved that the software is full au- tomation, and runs steadily and reliably. |
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| Keywords: | Large tilt ion implanter structure of software SEMI Automation Software Standards |
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