Peculiarities of the cross-section in chemically prepared SnO2- and SnO2:Sb layers

Layers of pure as well as Sb-doped tin dioxide have been prepared using intentionally simple modification of CVD technique. By electron microscopy of cross-section, at least two sublayers have been observed in samples of thickness of a few micrometers in both of the cases. Their formation is thought to be associated with small perturbation of thermodynamical equilibrium arising due to the layer growth.