Experimental and theoretical study of the pyrolysis of trichlorosilane |
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| Authors: | E A Chernyshev T L Krasnova E S Abramova E A Abronin A B Petrunin A P Sergeev |
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| Institution: | (1) M. V. Lomonosov Moscow State Academy of Fine Chemical Technology, 86 prosp. Vernadskogo, 117571 Moscow, Russian Federation |
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| Abstract: | Pyrolysis of trichlorosilane (TCS) and copyrolysis of TCS with 1,3-butadiene were studied. The enthalpies and activation energies
for the reactions of the products of TCS pyrolysis were found by quantum-chemical calculations. A direct study of the pyrolysis
of TCS by mass spectrometry was carried out. Based on the thermochemical parameters found by quantum-chemical calculations
and on the results of GLC and mass spectrometry concerning the composition of the pyrolysis products, it was concluded that
the pyrolysis of TCS follows a scheme that includes formation of radicals and silylenes.
Translated fromIzvestiya Akademii Nauk. Seriya Khimicheskaya, No. 9, pp. 1659–1662, September, 1997. |
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| Keywords: | trichlorosilane pyrolysis silylenes radicals |
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