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Structure related properties of obliquely deposited amorphous a-As2S3 thin films |
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| Authors: | K. Starbova J. Dikova N. Starbov |
| Abstract: | The surface roughness and morphology growth of a-As2S3 films vacuum deposited within a large scale of vapor incidence angles are studied. The formation of a columnar structure at normal and oblique deposition is demonstrated. The relationship between the micromorphology of the films and their optical and mechanical properties is revealed for as grown and annealed samples. |
| Keywords: | Amorphous films Arsenic compounds Thin films Surface structure Morphology Vapor deposition Film growth Vacuum Optical properties Mechanical properties Annealing Arsenic sulfide Oblique deposition Vapor incidence angle |
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