Quantitative auger electron spectroscopy analysis of AgPd and NiPd alloys

The relationship between peak amplitude in derivative Auger spectra and alloy composition was investigated for AgPd and NiPd alloys. Measurements were performed on polished and sputter etched samples as well as on samples fractured in vacuo. For clean alloy surfaces and in the absence of sputtering, a linear relationship between peak amplitude of a given alloy component and atomic concentration was observed. Relative Auger peak amplitudes measured on sputter cleaned surfaces were different from those measured on fractured surfaces. Results were interpreted in terms of a simple model considering surface enrichment of the alloy component with the lower relative sputtering yield.