Energy spectra of 6–32 keV neutral and ionized Ar and He scattered from Au targets; ionized fractions as functions of energy

The neutralization of ions is an important aspect of low energy ion scattering for surface analysis. Electrostatic energy analyzers (ESA) have been used almost exclusively in such work, and information on charge neutralization efficiencies is needed for quantitative interpretation of ESA data. In the past, the occurrence in low energy ion spectra of surface peaks and low backgrounds due to scattering from inside the solid has been attributed to preferential neutralization of ions which penetrate beyond the surface. In the work to be described, a time-of-flight technique was used to measure energy spectra of both neutral and ionized Ar and He scattered at 90° from a polycrystalline gold target. Incident energies of 6–32 keV were used. The energy spectra of neutral Ar scattered from polycrystalline gold exhibit sharp surface peaks, and double scattering shoulders, over this entire energy range. For He there is a gradual downward slope toward lower energy rather than a sharp surface peak. The behavior in both cases is attributed to large scattering cross-sections which cause a loss of beam particles during penetration. A calculation using a $\text{1}\text{r}{}^2$ potential illustrates this effect as a function of energy for helium. In the present experiments we find that the ion fraction of scattered argon does indeed depend on depth of penetration. This is in contrast to the behavior of He and H at higher energies, e.g. 100 keV, in which cases the charge state depends on emergent velocity but not on depth of penetration. The characteristic shapes of ion scattering spectra in this energy range appear to result from both neutralization and beam attenuation inside the target.