Affiliation: | (1) Kabardino-Balkar State University, ul. Chernyshevskogo 173, Nalchik, 360004, Russia;(2) Institute of Problems of Chemical Physics, Russian Academy of Sciences, Chernogolovka, Moscow region, 142432, Russia;(3) Institute of Microelectronic Technology and Ultra-High-Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow region, 142432, Russia |