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Investigation of Electrophysical Properties of ITO Films |
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| Authors: | Zhidik Yu. S. Troyan P. E. Kozik V. V. Kozyukhin S. A. Zabolotskaya A. V. Kuznetsova S. A. |
| Affiliation: | 1.Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia ;2.V. E. Zuev Institute of Atmospheric Optics of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia ;3.National Research Tomsk State University, Tomsk, Russia ;4.Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences, Moscow, Russia ; |
| Abstract: | Russian Physics Journal - The results of a study of the electrophysical characteristics of ITO films obtained by magnetron sputtering are presented. It is shown that a significant increase in the... |
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