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Cathodic Arc Evaporation of Polycrystalline Silicon |
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| Authors: | Dukhopel’nikov D. V. Kirillov D. V. |
| Affiliation: | 1.Bauman Moscow State Technical University, Moscow, Russia ; |
| Abstract: | Russian Physics Journal - The paper presents the experimental results of silicon cathodic arc evaporation in a continuous mode with the superimposed external arched magnetic field. Volt-ampere... |
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