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Ion Beam Generation in a Vacuum Arc Ion Source with a Multicomponent Cathode |
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| Authors: | Frolova V. P. Nikolaev A. G. Yushkov G. Yu. Kiziridi P. P. Prokopenko N. A. |
| Affiliation: | 1.Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia ;2.Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia ; |
| Abstract: | Russian Physics Journal - Vacuum arc ion sources are widely used for modifying the properties of various surfaces using ion implantation. The use of cathodes consisting of multicomponent compounds... |
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