Surface morphology of carbon-doped GaAs grown by MOVPE

The development of the surface structures of carbon-doped epitaxial GaAs layers grown by metalorganic vapor phase epitaxy was investigated by atomic force microscopy (AFM). Carbon-doped GaAs layers were grown using trimethyl gallium and a mixture of AsH₃/TMAs. The AFM micrographs were quantitatively analyzed through the determination of the height-height and height-difference correlation functions, which yields both the short and long range surface structures. The incorporation of carbon leads to the progressive roughening of the GaAs surface as well as an increase in surface correlation length. The high concentration of surface-adsorbed methyl radicals are suggested to lead to the diminution of growth rate and change in surface structure.