| 三半波带通滤光片的制作与膜厚分析 |
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| 引用本文： | 张子业,周东平,张凤山. 三半波带通滤光片的制作与膜厚分析[J]. 光子学报, 2005, 34(5): 710-712 |
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| 作者姓名： | 张子业 周东平 张凤山 |
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| 作者单位： | 中科院上海技术物理研究所,上海,200083;中科院上海技术物理研究所,上海,200083;中科院上海技术物理研究所,上海,200083 |
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| 摘 要： | 在光学薄膜镀制中, 比较片与样品片之间的厚度比例关系是间接监控法成功的重要参数. 计算表明, 三半波带通滤光片中心位置能大致推测出这一关系, 通带形状能粗略反映镀制过程中的变化以及不同膜料间的比例系数差别. 后期, 作者顺利制作出多个不同中心位置的带通滤光片.
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| 关 键 词： | 薄膜光学 三半波滤光片 比例系数 膜厚分析 |
| 收稿时间： | 2004-03-17 |
| 修稿时间： | 2004-03-17 |
Three Half-wave Filter and Analysis of Layer Thickness |
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| Zhang Ziye,Zhou Dongping,Zhang Fengshan. Three Half-wave Filter and Analysis of Layer Thickness[J]. Acta Photonica Sinica, 2005, 34(5): 710-712 |
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| Authors: | Zhang Ziye Zhou Dongping Zhang Fengshan |
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| Affiliation: | (Shanghai Institute of Technological Physics, Chinese Academy of Sciences,Shanghai 200083) |
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| Abstract: | Tooling factor is one of the most important parameters in optical thin film coating process. Calculation indicates that, while coating three half-wave filter, it is possible to roughly get this factor from the passband center position, factor variation and factor difference of different materials from the shape of measurement curve. With this method, we have produced several kinds of bandpass fileters. |
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| Keywords: | Film optics Three half-wave filter Tooling factor Thickness analyzing |
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