采用SPCE061A控制的白光干涉微纳扫描系统设计

针对小推力压电陶瓷迟滞特性，提出一种用SPCE061A单片机控制的新型白光干涉微纳扫描系统的设计。该扫描系统采用低压误差放大器OP07和高压功率放大器PA78双级放大器件为核心元件，使系统的整体带宽与放大倍数可调节，并对扫描系统中压电陶瓷微位移器的迟滞曲线采用最小二乘曲线拟合法进行数学建模。实验结果表明：输出电压在（0～200）V连续可调，纹波电压的最大值为1.06mV；应用于微纳扫描控制，能获得20μm扫描范围，控制精度达10nm，线性度为0.9，阶越响应时间1.5μs，可实现对微纳扫描系统精确、快速开环控制。

Design of white-light interference micro/nano scanning system controlled by SPCE061A

Aiming at the hysteresis property of PZT under small thrust, a novel design of a white-light interference micro-displacement scanning system controlled by SPCE061A MCU is proposed. The micro-displacement scanning system taking a low-voltage error magnifier OP07 and a high-voltage power amplifier PA78 as the key elements of voltage stabilizer, made the overall bandwidth and magnification adjustable. The mathematical modeling for the hysteresis curve of micro-displacement of PZT in the scanning system was carried out with the least square fitting method. The experimental results show that the output voltage can be continuously adjustable from 0 to 200V, the maximum value of the ripple voltage is 1.06mV, the total displacement of 20and the linearity of 0.9 can be obtained when applied to the micro/nano scanning control, and the system has step-response time of 1.5μs and the control accuracy of 10nm，which can realize the precise and rapid open-loop control for micro/nano scanning system.