Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry |
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| Authors: | de Groot Peter de Lega Xavier Colonna |
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| Institution: | Zygo Corporation, Middlefield, CT 06455, USA. peterd@zygo.com |
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| Abstract: | The Fourier components of interference signals generated by scanning a high-numerical-aperture objective orthogonal to an object surface correspond to different angles of incidence on the surface. The phase and amplitude of these Fourier components relate to the structure of the object, including in particular the 3D topography and thickness profiles of thin-film layers. |
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