Mechanical and electronic approaches to improve the sensitivity of microcantilever sensors |
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Authors: | Madhu Santosh Ku Mutyala Deepika Bandhanadham Liu Pan Vijaya Rohini Pendyala Hai-Feng Ji |
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Institution: | (1) Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USA;(2) Department of Chemistry, Drexel University, Philadelphia, PA 19104, USA |
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Abstract: | Advances in the field of micro electro mechanical systems and their uses now offer unique opportunities in the design of ultrasensitive
analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical
techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers
(MCLs) have emerged as a unique platform for label-free chem-sensor or bioassay. Several electronic designs, including piezoresistive,
piezoelectric, and capacitive approaches, have been applied to measure the bending or frequency change of the MCLs upon exposure
to chemicals. This review summarizes mechanical, fabrication, and electronics approaches to increase the sensitivity of MCL
sensors. |
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Keywords: | Microcantilever Sensor MEMS Sensitivity |
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