硅基光电集成用铒硅酸盐化合物光源材料和器件的研究进展

针对一种新型的硅基发光材料-铒镱/钇硅酸盐化合物开展了一系列基础研究。研究了铒硅酸盐，铒镱硅酸盐、铒钇硅酸盐高铒化合物材料的结构、光学和电学特性，通过优化铒镱/钇硅酸盐化合物材料的成分和结构，获得2个数量级的光致发光增强；制备出基于铒镱/钇硅酸盐薄膜材料的光波导放大器，观察到5 dB/cm以上的光放大；研制出金属-绝缘体-半导体结构电致发光器件，获得了铒镱/钇硅酸盐化合物的电致发光，并在理论上证明这种材料可以获得电泵浦激光的可能性。

Research progress of Er silicate compound light source materials and devices for silicon photonics application

We carried out a series of basic research for a kind of Si based novel luminescent materials, Er-Yb/ Y silicate compounds. We study the structure, optical and electrical properties of these high erbium compound materials including Er silicate, Er-Yb silicate and Er-Y silicate. Through the optimization of Er-Yb-Y compo- sition and structure of Er-Yb/Y silicate compound material, 2 orders of magnitude enhancement of photolumi- nescence is obtained. We prepare optical waveguide amplifier based on Er-Yb/Y silicate thin films, and ob- serve more than 5 dB/cm light amplification. We develop a metal-insulator-semiconductor structure of elec- troluminescent devices, and obtain Er-Yb/Y silicate compounds electroluminescence, and theoretically prove the possibility that this material can be electrically pumped laser.