Magnetron deposition of molybdenum mirrors and micrometer-thick mirror foil with an ordered columnar nanocrystalline structure

The formation of a molybdenum reflecting coating with a columnar nanocrystalline structure is studied under the condition when molybdenum is deposited by dc magnetron sputtering on single-crystalline molybdenum mirrors (substrates). The coating is found to peel off together with a polishing-induced imperfect amorphous surface layer of the substrate. This effect aids in obtaining a free mirror-like molybdenum foil. When the amorphous imperfect layer is removed from the substrate before deposition, the reflecting mirror coating has a good adhesion to the substrate.