|
|||||
|
|
Spectral investigation of the process of plasma etching of aluminum films |
|
| Authors: | V. V. Dubovskii A. A. Labuda N. N. Nikiforenko |
| Abstract: | Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 50, No. 3, pp. 374–380, March, 1989. |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |